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- VIBRATION sensor
VIBRATION sensor

- PRODUCTS
- VS 1000 Low-noise Vibration Sensor
- Vibration MEMS accelerometers are high end capacitive MEMS sensors, specially designed for vibration measurements from DC to medium frequencies. Vibration applications require low noise, resistance to repetitive high shocks and insensitivity to temperature environments to guarantee confidence of measurements in rugged environments

- Key Specification
- ◾ Large and flat frequency response from DC to 7000 Hz (±3dB, typ)
◾ Embedded self-test, temperature sensor
◾ Brownout protection for confident usage
◾ Very low noise (in band): 7 μg/√Hz for ±2g range (typ)
◾ Measurement range : ± 2 g, ± 5 g, ± 10 g, ± 30 g, ± 50 g, ± 100 g, ± 200 g - Application
- ◾ Bogie monitoring
◾ Instrumentation
◾ Automotive testing (ride quality, durability, ride & NVH, head rest vibration) 
- Ranges & performances
| VS1002 | VS1005 | VS1010 | VS1030 | VS1050 | VS1100 | VS1200 | Unit | |
|---|---|---|---|---|---|---|---|---|
| Full-scale acceleration | ±2 | ±5 | ±10 | ±30 | ±50 | ±100 | ±200 | g |
| Frequency response(±5%) | 0-700 | 0-1150 | 0-2000 | 0-2300 | 0-2700 | 0-2900 | 0-2500 | Hz |
| Frequency response(±3dB) | 0-1150 | 0-1900 | 0-3200 | 0-4000 | 0-4500 | 0-5000 | 0-7000 | Hz |
| Non-linearity(full scale) | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | % |
| Noise(In band) | 7 | 17 | 34 | 102 | 170 | 339 | 678 | μg/√Hz |
| Scale factor(normal) | 1'350 | 540 | 270 | 90 | 54 | 27 | 13.5 | mV/g |
| Scale factor temperature coefficient) | 120 | 120 | 120 | 120 | 120 | 120 | 120 | ppm/℃ |
| Bias temp. coefficient(min./max.) | ±0.2 | ±0.5 | ±1 | ±3 | ±5 | ±10 | ±20 | mg/℃ |
| Shock survivability | 6'000 | 6'000 | 6'000 | 6'000 | 6'000 | 6'000 | 6'000 | g |
Contact : Kang Dong-Wan , TEL +82-2-556-5288 , e-mail : kang@midoriya.co.jp



