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Inclinometer sensors
Inclination measurement occurs in such applications as positioning, aligning, leveling, navigation and orientation, directional drilling. Safran Colibrys capacitive low g MEMS accelerometers are the ideal candidates for inclination measurement systems due to sensors’ high resolution, low noise, long term bias repeatability, low consumption and small form factor (LCC20). Inclinometers feature hermetically sealed package to ensure performances stability for challenging inclination measurement applications.
- PRODUCTS
- MS9000 MEMS Inclinometer
- MS9000 is a fully calibrated bulk capacitive accelerometer specially designed for high performance inertial measurements. Its overall bias performances, robustness and low power are adapted for general inertial requirements even in harsh environments.
- Key Specification
- ◾ Long term bias stability : 7.5 mg (+/-10g, max.)
◾ Analogue ratiometric output, LCC 20 package
◾ Low Consumption : < 400 A @5 VDC
◾ Measurement range : ±2, ±5. ±10. ±30. ±50. ±100. ±200 - Application
- ◾ Platform stabilization
◾ MWD
- TS1000T High-Temp Inclinometer
- The TS1000T MEMS high temperature inclinometer is specifically designed very precise drilling applications.
It offers the highest performance repeatability with shock resistance, as well as the lowest non-linearity and noise in the MEMS marketplace. The TS1000T accelerometer covers challenging oil & gas drilling applications, like MWD or directional drilling, with operational temperature range going up to +175°C. 
- Key Specification
- ◾ High temperature range: -40° to +175°C
◾ Excellent bias residual modeling error: < 0.6 mg (±2g, typ)
◾ Endurance to high repetitive shocks: 1'500g (500 times)
◾ Low Noise: 7 μg/√Hz (±2g, typ)
◾ Measurement range : ± 2 g, ± 5 g, ± 10 g - Application
- ◾ Measurement while Drilling (MWD)
◾ Directional Drilling, RSS 
- MS 1000 MEMS Inclinometer
- Designed to address advanced, tactical grade inertial applications, the MS1000 is a new class of high performance accelerometers, based on Safran Colibrys’ 25-year MEMS development and production expertise.
MS1000 implements an innovative microelectromechanical design and electronics which unleash unbeatable performances with regard to the long term bias and scale factor repeatability, in-run bias and vibration rectification error (VRE). The 1000 series accelerometers share the same ceramic leadless hermetic package LCC20 as the 9000 series, hence preserving the same form factor.
MS1000 is available in a rich set of g-ranges +/-2, 5, 10, 30, 100g and is qualified for volume production. 
- Key Specification
- ◾ Long Term Bias Repeatability : 1.2 mg (+/10g, typ)
◾ Residual Bias Modeling error : 0.7 mg (+/10g, typ)
◾ In-run bias stability (Allan Variance @ 10 s): 15 μg (+/10g, typ)
◾ Non Linearity (IEEE Norm, % of full scale) : 0.3 %
◾ Measurement range : ±2, ±5. ±10. ±30. ±100 - Application
- ◾ Inertial Measurement Units (IMUs)
◾ Attitude system (AHRS, stand by)
◾ GPS aided guidance & navigation
Contact : Kang Dong-Wan , TEL +82-2-556-5288 , e-mail : kang@midoriya.co.jp
